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Let us help you with your inquiries, brochures and pricing requirements Motorized Xyz Stage
The high-speed, direct-drive rotation stages from PI (Physik Instrumente) LP have been fitted with brushless, frictionless, and closed-loop torque motors. The availability of such fast rotary tables offers the ideal combination of high velocity, high precision, and utmost service life.
PI offers closed-loop direct-drive rotary tables with mechanical and air bearings. The stage model comes with a low profile and large apertures. The stage design has been improved for high stiffness, speed, and load capacity.
Air-bearing rotation tables are recommended if maintenance-free and friction-free motion with an unlimited lifetime is needed. Such ultra-precision, high-speed rotary tables offer vibration-free motion with extremely high precision and negligible runout, wobble, and eccentricity errors.
The deficiency of lubricants makes these clean rooms consistent and ideal for any high-performance metrology application in photonics, optics, and semiconductor manufacturing, test, and metrology-related projects.
In opposition to belt-drive rotation stages or worm gear-driven rotary stages, the quick, direct-drive stages remove play in gears, couplings, or flex in drive belts, offering accurate rotary motion with zero backlash and outstanding constancy of velocity while obtaining higher speed compared to worm-gear drives.
High-speed rotary tables are utilized in high-performance factory automation, semiconductor, and laser processing applications and research. As a result of the use of brushless, high-torque motors with instant metrology position feedback, a backlash is entirely removed, and reliability has been greatly enhanced.
Generally, there is no variance. With the availability of greater models, a table is utilized more often, while smaller-size models are often referred to as stages.
With the availability of modern direct-metrology rotary encoders, sensor resolution down to 1/100th of a microrad is available on chosen models with large rotary table platforms. This utilizes the high interpolation factors of modern closed-loop brushless motors like what is offered by the PI’s EtherCat-based controllers.
Depending on the high encoder resolution and robust servo controllers, the direct-drive rotary tables also offer outstanding velocity control. This is needed in automation applications like high-speed laser processing, indexing, and semiconductor wafer inspection.
The majority of the Direct Drive Rotation stages could be mounted vertically and horizontally, with combinations of all 3 rotary degrees of freedom (3DOF, yaw, pitch, and roll) being addressed.
Direct Drive and Direct Encoder
Image Credit: PI (Physics Instruments) LP
Direct Drive, Absolute Encoder Option
Image Credit: PI (Physics Instruments) LP
Direct Drive, Absolute Encoder Option
Image Credit: PI (Physics Instruments) LP
Image Credit: PI (Physics Instruments) LP
Image Credit: PI (Physics Instruments) LP
Image Credit: PI (Physics Instruments) LP
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